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The role of oxygen in silicon for VLSI

✍ Scribed by K.E. Benson; W. Lin

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 774 KB
Volume: 70
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(84)90322-1

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