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The use of cavities for gettering in silicon microelectronic devices

✍ Scribed by S.E. Donnelly; V.M. Vishnyakov; G. Carter; J. Terry; L.I. Haworth; P. Sermanni; R.C. Birtcher

Book ID: 114167115
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 151 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00783-3

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