✦ LIBER ✦
A new technology for manufacturing the dielectric isolation of elements of microelectronic devices by oxidizing grooves in single-crystal silicon
✍ Scribed by Yu. P. Snitovskii; M. G. Krasikov
- Book ID
- 110214425
- Publisher
- Springer
- Year
- 2010
- Tongue
- English
- Weight
- 305 KB
- Volume
- 39
- Category
- Article
- ISSN
- 1063-7397
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