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The thermal stability of iron precipitates in silicon after internal gettering

✍ Scribed by Peng Zhang; Hele Väinölä; Andrei A. Istratov; Eicke R. Weber

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
232 KB
Volume
340-342
Category
Article
ISSN
0921-4526

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