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The role of nitrogen in the formation of luminescent silicon nanoprecipitates during heat treatment of SiO2layers implanted with Si+ions

✍ Scribed by G. A. Kachurin; S. G. Yanovskaya; K. S. Zhuravlev; M. -O. Ruault

Book ID: 110128310
Publisher: Springer
Year: 2001
Tongue: English
Weight: 75 KB
Volume: 35
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1410661

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