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The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

โœ Scribed by Fox, O.J.L.; Ma, J.; May, P.W.; Ashfold, M.N.R.; Mankelevich, Yu.A.


Book ID
123537388
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
710 KB
Volume
18
Category
Article
ISSN
0925-9635

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