Enhancing photoluminescence of nanocryst
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Chun-Yu Lin; Yean-Kuen Fang; Shih-Fang Chen; Shiuan-Ho Chang; Tse-Heng Chou
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Article
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2006
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Elsevier Science
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English
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The authors report the photoluminescence (PL) property of nanocrystalline silicon (nc-Si) enhanced by oxygen plasma oxidation technology. The oxidized nanocrystalline silicon thin films were investigated by PL, transmission electron microscope (TEM), micro-Raman scattering and X-ray diffraction (XRD