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The role of gas-phase in the laser etching of Cu by CCl4

✍ Scribed by D. Débarre; A. Aliouchouche; J. Boulmer; B. Bourguignon; J.P. Budin

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
327 KB
Volume
96-98
Category
Article
ISSN
0169-4332

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