Determination of electrical types in the
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Young Yi Kim; Won Suk Han; Hyung Koun Cho
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Article
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2010
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Elsevier Science
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English
β 310 KB
P-doped ZnO films were grown under various gas ambiences on c-plane sapphire substrates by RF magnetron sputtering. A 1 at.% P 2 O 5 (99.999%) mixed ZnO (99.999%) target with a diameter of 4 in.