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Research on the properties of ZnO thin films deposited by using filtered cathodic arc plasma technique on glass substrate under different flow rate of O2

✍ Scribed by C. Li; X.C. Li; P.X. Yan; E.M. Chong; Y. Liu; G.H. Yue; X.Y. Fan


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
579 KB
Volume
253
Category
Article
ISSN
0169-4332

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