Determination of electrical types in the P-doped ZnO thin films by the control of ambient gas flow

✍ Scribed by Young Yi Kim; Won Suk Han; Hyung Koun Cho

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 310 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2010.01.035

✦ Synopsis

P-doped ZnO films were grown under various gas ambiences on c-plane sapphire substrates by RF magnetron sputtering. A 1 at.% P 2 O 5 (99.999%) mixed ZnO (99.999%) target with a diameter of 4 in.