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The preparation of cross-sectional transmission electron microscopy specimens of Nb/Al multilayer thin films on sapphire substrates

โœ Scribed by Barmak, Katayun ;Rudman, David A. ;Foner, Simon

Publisher
Wiley (John Wiley & Sons)
Year
1990
Tongue
English
Weight
607 KB
Volume
16
Category
Article
ISSN
0741-0581

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โœฆ Synopsis

Abstract

We have developed a technique for preparation of crossโ€sectional transmission electron microscopy samples of reacted and unreacted Nb/al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and Nbโ€compounds and therefore makes it possible to obtain the electron transparent regions in the thin films rather than in the substrate. However, the brittle nature of the sapphire restricts the types of thinning techniques that can be used, requiring extensive ion thinning as a final stage.

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