Properties of YBCO films prepared by pur
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Toshiyuki Matsui; Takeshi Suzuki; Hiroshi Kimura; Koichi Tsuda; Megumi Nagano; K
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Article
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1991
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Elsevier Science
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English
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Behavior of ox)-gcn during the deposition process was investigated by an rf magnetron sputtering method with pure Ar gas. Although pure Ar gas was used as a sputtering gas, YIBa2CM3Ox(YBCO) films deposited in the pressure region from 0.2 to 2Pa showed superconductivity. It suggests that sufficient o