Properties of YBCO films prepared by pure argon sputtering

✍ Scribed by Toshiyuki Matsui; Takeshi Suzuki; Hiroshi Kimura; Koichi Tsuda; Megumi Nagano; Kazuo Mukae

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 202 KB
• Volume: 185-189
• Category: Article
• ISSN: 0921-4534
• DOI: 10.1016/0921-4534(91)91111-g

✦ Synopsis

Behavior of ox)-gcn during the deposition process was investigated by an rf magnetron sputtering method with pure Ar gas. Although pure Ar gas was used as a sputtering gas, YIBa2CM3Ox(YBCO) films deposited in the pressure region from 0.2 to 2Pa showed superconductivity. It suggests that sufficient oxygen to form the superconducting structure at a low gas pressure around 1Pa was supplied from the target.