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The prediction of stiction failures in MEMS

โœ Scribed by van Spengen, W.M.; Puers, R.; De Wolf, I.

Book ID
120648120
Publisher
IEEE
Year
2003
Tongue
English
Weight
342 KB
Volume
3
Category
Article
ISSN
1530-4388

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## Abstract Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effec