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On the stiction of MEMS materials

✍ Scribed by Y.X. Zhuang; A. Menon

Book ID
106550870
Publisher
Springer US
Year
2005
Tongue
English
Weight
293 KB
Volume
19
Category
Article
ISSN
1023-8883

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## Abstract Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effec