Stiction issues and actuation of RF LIGA-MEMS variable capacitors

✍ Scribed by Darcy T. Haluzan; David M. Klymyshyn; Martin Börner; Sven Achenbach; Garth Wells; Timo Mappes; Jürgen Mohr

• Book ID: 106185476
• Publisher: Springer-Verlag
• Year: 2008
• Tongue: English
• Weight: 385 KB
• Volume: 14
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-008-0583-6