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Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor

✍ Scribed by Dong-Ming Fang; Xiang-Meng Jing; Pei-Hong Wang; Yong Zhou; Xiao-Lin Zhao

Book ID
106185381
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
397 KB
Volume
14
Category
Article
ISSN
0946-7076

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