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The Surface Modification with Fluorocarbon Thin Films for the Prevention of Stiction in Mems

โœ Scribed by Lee, Sang-Ho; Kwon, Myong-Jong; Park, Jin-Goo; Kim, Yong-Kweon; Shin, Hyung-Jae

Book ID
120822177
Publisher
Cambridge University Press
Year
1998
Weight
367 KB
Volume
518
Category
Article
ISSN
0272-9172

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Low temperature growth of thin film coat
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โœ P. Mandracci; F. Mussano; C. Ricciardi; P. Ceruti; F. Pirri; S. Carossa ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 511 KB

In this work we present some results about the low temperature, plasma-assisted growth of silicon-oxygen amorphous thin film alloys (a-SiO x ) on different types of dental materials used for the fabrication of dental prostheses. The a-SiO x films were grown at substrate temperatures lower than 70 ยฐC