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Predicting the Failure Probability of Device Features in MEMS

✍ Scribed by D. M. Pierce; B. Zeyen; B. M. Huigens; A. M. Fitzgerald

Book ID: 126645906
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 903 KB
Volume: 11
Category: Article
ISSN: 1530-4388
DOI: 10.1109/TDMR.2011.2159117

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