After a short summary of the status of the buried 6x~qCle layer in SIMOX structures as of 1994, this pal~er reviews the developments since then. The main fOf~iCS are as follows: effects of processing condltiOttS, such aS low oxygen dose implantation, add;lionel oxidation; holetrappng behavior and co
โฆ LIBER โฆ
The oxide layer charging in SIMOX structures
โ Scribed by A. Yu. Askinazi; A. P. Baraban; V. A. Dmitriev; L. V. Miloglyadova
- Book ID
- 110127031
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2001
- Tongue
- English
- Weight
- 32 KB
- Volume
- 27
- Category
- Article
- ISSN
- 1063-7850
No coin nor oath required. For personal study only.
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