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The origin of stress reduction by low-temperature AlN interlayers

✍ Scribed by Bläsing, J.; Reiher, A.; Dadgar, A.; Diez, A.; Krost, A.

Book ID: 121716297
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 306 KB
Volume: 81
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1512331

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