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The optical properties and applications of AlN thin films prepared by a helicon sputtering system

✍ Scribed by Chiu, W. Y.; Wu, C. H.; Kao, H. L.; Jeng, Erik S.; Chen, Jyh Shin; Jaing, C. C.

Book ID: 126305428
Publisher: AVS (American Vacuum Society)
Year: 2002
Tongue: English
Weight: 313 KB
Volume: 20
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1470512

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