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Synthesis and SAW characteristics of AlN thin films fabricated on Si and GaN using helicon sputtering system

✍ Scribed by Chen, S.W.; Lin, H.F.; Sung, T.T.; Wu, J.D.; Kao, H.L.; Chen, J.S.

Book ID: 126305315
Publisher: The Institution of Electrical Engineers
Year: 2003
Tongue: English
Weight: 194 KB
Volume: 39
Category: Article
ISSN: 0013-5194
DOI: 10.1049/el:20031088

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