✦ LIBER ✦
Synthesis and Surface Acoustic Wave Properties of AlN Thin Films Fabricated on (001) and (110) Sapphire Substrates Using Chemical Vapor Deposition of A l C l 3 – N H 3 System
✍ Scribed by Kaya, Kiyoshi; Takahashi, Hiroshi; Shibata, Yoshihiko; Kanno, Yasuhito; Hirai, Toshio
- Book ID
- 125530562
- Publisher
- Institute of Pure and Applied Physics
- Year
- 1997
- Tongue
- English
- Weight
- 1019 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0021-4922
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