Growth of AlN and GaN Thin Films on Si(100) Using New Single Molecular Precursors by MOCVD Method

✍ Scribed by Boo, J.-H. ;Lee, S.-B. ;Kim, Y.-S. ;Park, J. T. ;Yu, K.-S. ;Kim, Y.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 210 KB
• Volume: 176
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199911)176:1<711::aid-pssa711>3.0.co;2-y