✦ LIBER ✦

The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma

✍ Scribed by Chung, ChinWook; Chang, Hong-Young

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ Kolobov, V. I.; Parker, G. J.; Hitchon, W. N. G. 📂 Article 📅 1996 🏛 The American Physical Society 🌐 English ⚖ 828 KB

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✍ Singh, Harmeet; Graves, David B. 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 384 KB

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✍ Boffard, John B; Jung, R O; Lin, Chun C; Wendt, A E 📂 Article 📅 2010 🏛 Institute of Physics 🌐 English ⚖ 435 KB

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✍ Bowden, M. D.; Tabata, R.; Suanpoot, P.; Uchino, K.; Muraoka, K.; Noguchi, M. 📂 Article 📅 2001 🏛 American Institute of Physics 🌐 English ⚖ 299 KB