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Modeling of nonlocal electron kinetics in a low-pressure inductively coupled plasma

✍ Scribed by Kolobov, V. I.; Parker, G. J.; Hitchon, W. N. G.

Book ID: 121479653
Publisher: The American Physical Society
Year: 1996
Tongue: English
Weight: 828 KB
Volume: 53
Category: Article
ISSN: 1063-651X
DOI: 10.1103/PhysRevE.53.1110

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