Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

✍ Scribed by Lee, Hyo-Chang; Lee, Min-Hyong; Chung, Chin-Wook

• Book ID: 121465768
• Publisher: American Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 357 KB
• Volume: 96
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.3291038