✦ LIBER ✦

The mechanism of d.c. reactive sputtering

✍ Scribed by B. Goranchev; I. Petrov; V. Orlinov

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

D.C. reactively sputtered iron oxide fil

✍ V. Orlinov; B. Goranchev; G. Sarov; A. Misiuk 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 430 KB

The mechanism of reactive sputtering

✍ E. Hollands; D. S. Campbell 📂 Article 📅 1968 🏛 Springer 🌐 English ⚖ 727 KB

Mechanism of rf reactive sputtering

✍ Shinoki, F.; Itoh, A. 📂 Article 📅 1975 🏛 American Institute of Physics 🌐 English ⚖ 410 KB

Reactive high rate d.c. sputtering of ox

✍ M. Scherer; P. Wirz 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Deposition of SiNx by reactive d.c. magn

✍ PeterJ. Clarke 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 35 KB

Deposition of AlOxFy films using d.c. re

✍ A. Belkind; B. Kopp; R. Sherman 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 518 KB