✦ LIBER ✦

The interaction of dimethylethylaminealane and ammonia on clean and oxidized Al(111): atomic layer growth of aluminum nitride

✍ Scribed by A Ludviksson; David W Robinson; J.W Rogers Jr.

Book ID: 108388923
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 631 KB
Volume: 289
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)08896-7

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Adsorption of H2O on Al(111) and the int

Adsorption of H2O on Al(111) and the interaction of atomic D with the ice layer

✍ H. Pölzl; F. Zinka; D. Gleispach; A. Winkler 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 562 KB

GROWTH AND ATOMIC STRUCTURE OF ULTRATHIN

GROWTH AND ATOMIC STRUCTURE OF ULTRATHIN COBALT LAYERS ON THE Cu(111) FACE CLEAN AND PRECOVERED WITH LEAD

✍ MRÓZ, S.; OTOP, H.; JANKOWSKI, Z. 📂 Article 📅 1997 🏛 World Scientific Publishing Company 🌐 English ⚖ 529 KB

The effect of oxygen source on atomic la

The effect of oxygen source on atomic layer deposited Al2O3 as blocking oxide in metal/aluminum oxide/nitride/oxide/silicon memory capacitors

✍ Nikolaou, Nikolaos; Ioannou-Sougleridis, Vassilios; Dimitrakis, Panagiotis; Norm 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 906 KB

Island growth in the atomic layer deposi

Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

✍ R. L. Puurunen; W. Vandervorst; W. F. A. Besling; O. Richard; H. Bender; T. Cona 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 666 KB

Strengthening and Prevention of Oxidatio

Strengthening and Prevention of Oxidation of Aluminum Nitride by Formation of a Silica Layer on the Surface

✍ Young-Hag Koh; Jong-Jin Choi; Hyoun-Ee Kim 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 714 KB

Role of Interfacial Aluminum Silicate an

Role of Interfacial Aluminum Silicate and Silicon as Barrier Layers for Atomic Layer Deposition of Al 2 O 3 Films on Chemically Cleaned InP(100) Surfaces

✍ Cabrera, Wilfredo; Halls, Mathew D.; Povey, Ian M.; Chabal, Yves J. 📂 Article 📅 2014 🏛 American Chemical Society 🌐 English ⚖ 812 KB