Role of Interfacial Aluminum Silicate and Silicon as Barrier Layers for Atomic Layer Deposition of Al 2 O 3 Films on Chemically Cleaned InP(100) Surfaces

✍ Scribed by Cabrera, Wilfredo; Halls, Mathew D.; Povey, Ian M.; Chabal, Yves J.

• Book ID: 126539691
• Publisher: American Chemical Society
• Year: 2014
• Tongue: English
• Weight: 812 KB
• Volume: 118
• Category: Article
• ISSN: 1932-7447
• DOI: 10.1021/jp5052084