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The influence of Ti capping layers on CoSi2 formation

✍ Scribed by C Detavernier; R.L Van Meirhaeghe; F Cardon; R.A Donaton; K Maex

Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
161 KB
Volume
50
Category
Article
ISSN
0167-9317

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