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The influence of the target age on laterally resolved ion distributions in reactive planar magnetron sputtering

✍ Scribed by Thomas Welzel; Klaus Ellmer

Book ID: 113919385
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 985 KB
Volume: 205
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.01.050

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