✦ LIBER ✦
Diagnostic on N2 plasma with an energy resolved quadrupole mass spectrometer at the powered electrode in a reactive ion etching system: ion energy distribution of N2+ and N+
✍ Scribed by F. Becker; I.W. Rangelow; K. Maßeli; R. Kassing
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 429 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
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