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The influence of sloped absorber sidewalls in deep x-ray lithography

✍ Scribed by J. Schulz; A. El-Kholi; J. Göttert; K. Kadel; J. Mohr

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 395 KB
Volume: 21
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90040-c

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