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Investigation of the adhesive strength of PMMA structures on substrates obtained by deep X-ray lithography

✍ Scribed by A. Schmidt; A. Clifton; W. Ehrfeld; G. Feiertag; H. Lehr; M. Schmidt

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 337 KB
Volume: 30
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00230-8

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