✦ LIBER ✦
Examination of the solubility and the molecular weight distribution of PMMA in view of an optimised resist system in deep etch x-ray lithography
✍ Scribed by A. El-Kholi; P. Bley; J. Göttert; J. Mohr
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 276 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
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