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The influence of Si coverage in a chip on layer profile of selectively grown Si1 − xGex layers using RPCVD technique

✍ Scribed by M. Kolahdouz; R. Ghandi; J. Hållstedt; M. Ösling; R. Wise; Hans Wejtmans; H.H. Radamson

Book ID: 108290186
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 160 KB
Volume: 517
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2008.08.085

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The influence of Si coverage in a chip on layer profile of selectively grown Si1&#xa0;−&#xa0;xGex layers using RPCVD technique

The influence of Si coverage in a chip on layer profile of selectively grown Si1 − xGex layers using RPCVD technique