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The influence of rotation during sputtering on the stoichiometry of TiAlN/CrNx multilayer coating

✍ Scribed by M. Panjan; S. Šturm; P. Panjan; M. Čekada

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
755 KB
Volume
203
Category
Article
ISSN
0257-8972

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A range of calcium phosphate (Ca-P) coatings have been sputter deposited at low deposition power from Ca-P targets with different phase compositions. The resultant surfaces were analysed both before and after post-deposition annealing (PDA) using X-ray Diffraction (XRD), Fourier Transform Infrared S