The influence of process parameters on the properties of chromium-nitrogen coating by d.c. reactive sputtering at room temperature

✍ Scribed by Y.G. Chang; R.K. Warsop; N.E. Farb; R. Parsons

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 697 KB
• Volume: 68-69
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(94)90154-6