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Influence of the sputtering pressure on lead silicate glassy film stoichiometry

โœ Scribed by V. Rigato; G. Maggioni; G. Della Mea


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
401 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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A range of calcium phosphate (Ca-P) coatings have been sputter deposited at low deposition power from Ca-P targets with different phase compositions. The resultant surfaces were analysed both before and after post-deposition annealing (PDA) using X-ray Diffraction (XRD), Fourier Transform Infrared S