The influence of target stoichiometry on
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C. O'Kane; H. Duffy; B.J. Meenan; A.R. Boyd
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Article
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2008
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Elsevier Science
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English
โ 859 KB
A range of calcium phosphate (Ca-P) coatings have been sputter deposited at low deposition power from Ca-P targets with different phase compositions. The resultant surfaces were analysed both before and after post-deposition annealing (PDA) using X-ray Diffraction (XRD), Fourier Transform Infrared S