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The influence of external parameters on the peculiarities of a hybrid low-pressure radio-frequency discharge

✍ Scribed by K. V. Vavilin, M. A. Gomorev, E. A. Kralkina, P. A. Nekludova, V. B. Pavlov, Chen Zhao


Book ID
115064487
Publisher
Allerton Press, Inc.
Year
2012
Tongue
English
Weight
178 KB
Volume
67
Category
Article
ISSN
0027-1349

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