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Influence of Discharge Parameters on the Resultant Sputtered Crater Shapes for a Radio Frequency Glow Discharge Atomic Emission Source

✍ Scribed by Parker, Mark; Hartenstein, Matthew L.; Marcus, R. Kenneth

Book ID: 126301299
Publisher: American Chemical Society
Year: 1996
Tongue: English
Weight: 415 KB
Volume: 68
Category: Article
ISSN: 0003-2700
DOI: 10.1021/ac960259t

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