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Influence of discharge parameters on the resultant sputtered crater shapes for a radio frequency glow discharge mass spectrometry source

✍ Scribed by Gibeau, Terri E.; Marcus, R. Kenneth

Book ID: 124099446
Publisher: Royal Society of Chemistry
Year: 1998
Tongue: English
Weight: 195 KB
Volume: 13
Category: Article
ISSN: 0267-9477
DOI: 10.1039/A803894E

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