✦ LIBER ✦

An experimental study of the plasma parameters of a hybrid low-pressure RF discharge

✍ Scribed by K. V. Vavilin, M. A. Gomorev, E. A. Kralkina, P. A. Nekludova, V. B. Pavlov, Chen Zhao

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Scaling characteristics of plasma parame

✍ Chung, T.H.; Seo, D.C.; Kim, G.H.; Kim, J.S. 📂 Article 📅 2001 🏛 IEEE 🌐 English ⚖ 98 KB

Radial inhomogenity of plasma parameters

✍ Kralkina, E. A.; Nekliudova, P. A.; Pavlov, V. B.; Vavilin, K. V.; Tarakanov, V. 📂 Article 📅 2014 🏛 Allerton Press, Inc. 🌐 English ⚖ 688 KB

Experimental study of patterns of energy

✍ A. F. Alexandrov; K. V. Vavilin; E. A. Kral’kina; V. B. Pavlov; A. A. Rukhadze; 📂 Article 📅 2010 🏛 Allerton Press, Inc. 🌐 English ⚖ 219 KB

Influence of plasma extraction on a cyli

✍ Krimke, R.; Urbassek, H.M. 📂 Article 📅 1995 🏛 IEEE 🌐 English ⚖ 619 KB

Experimental Study of the Discharge in t

✍ Klusoiň, J.; Kudrna, P.; Kolpaková, A.; Picková, I.; Hubička, Z.; Tichý, M. 📂 Article 📅 2013 🏛 John Wiley and Sons 🌐 English ⚖ 220 KB

Kinetics of an RF low-pressure discharge

✍ V. I. Strunin; A. A. Lyakhov; G. Zh. Khudaibergenov; V. V. Shkurkin 📂 Article 📅 2004 🏛 Springer 🌐 English ⚖ 46 KB