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The Impact of the Layer Thickness on the Thermodynamic Properties of Pd Hydride Thin Film Electrodes

✍ Scribed by Vermeulen, Paul; Ledovskikh, Alexander; Danilov, Dmitry; Notten, Peter H. L.


Book ID
126121371
Publisher
American Chemical Society
Year
2006
Tongue
English
Weight
142 KB
Volume
110
Category
Article
ISSN
0022-3654

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Thin-film transistors (TFTs) were fabricated on SiO 2 /n + -Si substrates using amorphous binary In 2 O 3 -ZnO (a-IZO) films with different thickness for active channel layers deposited by the rf magnetron sputtering at room temperature. The performance of devices was found to be thickness dependent