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The impact of metal-1 plasma processing-induced hot carrier injection on the characteristics and reliability of n-MOSFETs

✍ Scribed by El Hassan, M.G.; Awadelkarim, O.O.; Werking, J.D.

Book ID: 114537235
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 145 KB
Volume: 45
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.662791

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