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The impact of deuterated CMOS processing on gate oxide reliability

โœ Scribed by Hof, A.J.; Hoekstra, E.; Kovalgin, A.Y.; van Schaijk, R.; Baks, W.M.; Schmitz, J.


Book ID
114617950
Publisher
IEEE
Year
2005
Tongue
English
Weight
205 KB
Volume
52
Category
Article
ISSN
0018-9383

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Impact of Ge content on the gate oxide r
โœ Suresh Uppal; Mehdi Kanoun; John B. Varzgar; Sanatan Chattopadhyay; Sarah Olsen; ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 307 KB

In this paper we study the impact of the variation of Ge content on the gate oxide reliability of strained-Si/SiGe (s-Si/SiGe) MOS devices. MOS capacitors and n-MOSFET devices were fabricated on Si, and strained Si grown on SiGe virtual substrates with a Ge content of 10 and 30%. The devices had pol