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The homoepitaxy of GaN by metalorganic vapor phase epitaxy using GaN substrates

✍ Scribed by T. Detchprohm; K. Hiramatsu; N. Sawaki; I. Akasaki


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
371 KB
Volume
137
Category
Article
ISSN
0022-0248

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Selective Growth of Cubic GaN on Pattern
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Selective growth of cubic GaN on patterned GaAs substrates was studied. The structural and morphological properties of cubic GaN are very dependent on the orientation of the mask stripes. In the case of window stripe opening along [011] direction, (111)B facets were clearly observed in all the sampl